| 发明名称 |
Integrated high vacuum pumping system |
| 摘要 |
The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.
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| 申请公布号 |
US2006034715(A1) |
申请公布日期 |
2006.02.16 |
| 申请号 |
US20040916081 |
申请日期 |
2004.08.11 |
| 申请人 |
BOGER MICHAEL S;MURPHY DAIMHIN P;BAILEY CHRISTOPHER M;ENOMOTO YOSHIHIRO |
发明人 |
BOGER MICHAEL S.;MURPHY DAIMHIN P.;BAILEY CHRISTOPHER M.;ENOMOTO YOSHIHIRO |
| 分类号 |
F04B17/00;F04B35/04 |
主分类号 |
F04B17/00 |
| 代理机构 |
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