发明名称 Thin film transistor and method of fabricating the same
摘要 The present invention discloses a thin film transistor and a method of fabricating the same. The thin film transistor includes an insulating substrate; and a semiconductor layer, a gate insulating layer, a gate electrode, an interlayer insulator, and a source/drain electrode which are formed on the substrate, wherein the gate insulating layer is formed of a filtering oxide layer having a thickness of 1 to 20 Å.
申请公布号 US2006033107(A1) 申请公布日期 2006.02.16
申请号 US20040019456 申请日期 2004.12.23
申请人 LEE KEUN-SOO;PARK BYOUNG-KEON 发明人 LEE KEUN-SOO;PARK BYOUNG-KEON
分类号 H01L29/786;H01L21/84 主分类号 H01L29/786
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