Schwingungskonstruktion

摘要

A vibratory structure and a method for controlling the natural frequency thereof are provided. The device has at least one elastic member supported by a first support end, an inertial object which vibrates by the elastic force of the elastic member, a moving electrode coupled to the inertial object, at least one effective stiffness controlling electrode supported by a second support end, and a power supplier for applying a voltage to generate an electric force between the moving electrode and the effective stiffness controlling electrode. This vibratory structure can contribute to controlling and improving the performance of a sensor, an actuator or a gyroscope, which employs the vibratory structure.