| 发明名称 |
CONTROL SYSTEM, CONTROL METHOD, PROCESSING SYSTEM, COMPUTER READABLE STORING MEDIUM AND COMPUTER PROGRAM |
| 摘要 |
<p>A control system is provided with a controller (17) for controlling a processor (10) based on a plurality of pieces of information detected by the processor (10) which performs prescribed processing to a wafer (W), and an alarm generating means (21) for giving an alarm when the detected process information is out of a prescribed range. The controller (17) grasps an alarm generating status, and when the status reaches a prescribed threshold value, the controller issues a warning.</p> |
| 申请公布号 |
WO2006016436(A1) |
申请公布日期 |
2006.02.16 |
| 申请号 |
WO2005JP05805 |
申请日期 |
2005.03.29 |
| 申请人 |
TOKYO ELECTRON LIMITED;MORI, KAZUSHI |
发明人 |
MORI, KAZUSHI |
| 分类号 |
(IPC1-7):G05B23/02;H01L21/304;H01L21/306;H01L21/02 |
主分类号 |
(IPC1-7):G05B23/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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