| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an anti-reflection film for optical components of an optical glass system, permitting to improve an S/N ratio in observation treating very feeble light such as microscope observation, by preventing collapse of surface particles due to eradication of magnesium fluoride and suppressing micro-scattering. <P>SOLUTION: The anti-reflection film formed on a substrate 10 made of glass is provided with a thin film 30 having a columnar structure deposited by heating on the substrate under environment of ≥200°C, and an amorphous film 40 formed on the thin film 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
