WORK TABLE FOR LIQUID DROP DELIVERY APPARATUS, LIQUID DROP DELIVERY APPARATUS PROVIDED WITH THIS, PRODUCTION METHOD FOR ELECTRIC OPTICAL APPARATUS, ELECTRIC OPTICAL APPARATUS AND ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a work table for a liquid drop delivery apparatus capable of accurately maintaining flatness of a work W adsorbed/placed on an adsorption table even in the adsorption table in the division form, and a liquid drop delivery apparatus provided with this. SOLUTION: In the work table 12 for the liquid drop delivery apparatus 1, while relatively moving a function liquid drop delivery head 3 introduced with the function liquid in an X axis direction and Y axis direction relative to the work W, the function liquid is delivered on the work W to perform drawing. The work table 12 is provided with an adsorption table 37 made of ceramic and adsorbing/placing the work W is provided and the adsorption table 37 is formed by mutually integrally joining a plurality of table pieces 58. COPYRIGHT: (C)2006,JPO&NCIPI