发明名称 |
Computer-implemented methods for generating input for a simulation program or generating a simulated image of a reticle |
摘要 |
Various computer-implemented methods are provided. One computer-implemented method for generating input for a simulation program includes combining information about a defect detected on a partially fabricated reticle with information about phase assigned to an area of the reticle proximate to the defect. The phase is to be added to the reticle on a level other than a level on which the defect is formed. The defect is detected on the reticle prior to addition of the phase to the reticle. Another computer-implemented method includes generating a simulated image of a defect on a reticle using information about the defect generated by inspection of one level of the reticle in combination with information about a different level on the reticle.
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申请公布号 |
US2006036979(A1) |
申请公布日期 |
2006.02.16 |
申请号 |
US20050181358 |
申请日期 |
2005.07.14 |
申请人 |
ZURBRICK LARRY S;LEHON HAROLD W |
发明人 |
ZURBRICK LARRY S.;LEHON HAROLD W. |
分类号 |
G06F17/50;G03F1/00 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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