APPARATUS FOR EVALUATING SEMICONDUCTOR WAFER

摘要

An apparatus for evaluating electrical characteristics of a semiconductor wafer, at least comprising a wafer cassette section for mounting a wafer cassette which contains a semiconductor wafer to be evaluated, a wafer preprocessing section for preprocessing the semiconductor wafer in order to evaluate the electrical characteristics, a mercury probe section for evaluating the electrical characteristics of the semiconductor wafer by using a mercury probe, and an automatic carrying section for carrying the semiconductor wafer to each of the sections. The apparatus can, in evaluation of electrical characteristics of a semiconductor wafer, accurately evaluate them without allowing contaminants such as particles to adhere to the major surface of the wafer, and the apparatus has high evaluation efficiency.