| 摘要 |
An exposure apparatus for exposing an object to be exposed by elastically deforming an exposing mask having a micro-opening pattern so as to bring the exposing mask into contact with the object includes a compression/decompression section for elastically deforming the exposing mask with compression/decompression so as to bring the exposing mask into contact with the object or into detachment from the object; and a controlling section for controlling the compression/decompression operation with the compression/decompression section. The controlling section controls the compression/decompression operation with the compression/decompression section based on control data prepared in advance.
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