| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solenoid drive device of smaller size and lighter weight, of which driving efficiency is improved and high-speed control and positioning precision are improved. <P>SOLUTION: A stator provided to the solenoid drive device comprises magnet trains M1 and M2, and a moving member that moves relative to the stator comprises a magnet train 23. The magnet trains M1 and M2 comprise, respectively, a plurality of permanent magnets 14 and 17 so arrayed that the same poles are aligned along the moving direction of the stator. The permanent magnets 14 and 17 are so set that facing magnetic poles are different from each other, and in the magnet train 23, magnetic poles are so set that the permanent magnets 14 and 17 are faced by different poles. Each of the permanent magnet 14 is wound with a coil 13 for generating diamagnetic field, and each of the permanent magnet 17 is wound with a coil 16 for generating a diamagnetic field. The current supplied to the coils 13 and 16 is controlled so that the moving member is moved in y direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
