| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion aligner which comprises a liquid recovery mechanism which restricts influences from a recovered liquid. <P>SOLUTION: The aligner EX comprises the liquid recovery mechanism 20 for recovering a liquid. At least a part of a liquid contact face coming into contact with the recovered liquid out of the liquid recovery mechanism 20 has a corrosion resistance to the liquid. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
