| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor dynamic quantity sensor capable of constituting a movable part of constant height, and a method of manufacturing the same. SOLUTION: A semiconductor acceleration sensor is constituted using a layered substrate 1 formed with a silicon layer 4 on a silicon substrate 2 via an embedded oxide film 3. A cavity 10 extended in a lateral direction is formed in a portion contacting with the embedded oxide film 3, in the silicon layer 4, and the movable part 24 is formed in the silicon layer 4, by grooves 12a, 12b reaching the cavity 10 in the silicon layer 4. A silicon oxide film 40 is arranged on a ceiling face of the cavity 10 in the silicon layer 4. COPYRIGHT: (C)2006,JPO&NCIPI |
