| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic driver in which moving speed of a mover can be prevented from lowering due to friction occurring through contact between the end face of the mover and the sidewall of the same when the mover is moving. SOLUTION: The electrostatic driver comprises a stator 11 having a plurality of drive electrodes 12, a mover 14 being driven by the plurality of drive electrodes 12 while having a plurality of parts polarized permanently and provided with an edge formed on the end face along the moving direction by intersecting a plurality of faces, and a position regulating sidewall 13 opposing the edge and guiding the mover. COPYRIGHT: (C)2006,JPO&NCIPI
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