| 摘要 |
PROBLEM TO BE SOLVED: To prevent the contamination of a window constituting a gas laser oscillator. SOLUTION: A container structure constituted of a Bessel 1, a gate valve 5, and a housing 6 defines: a main cavity S<SB>1</SB>in which a laser medium gas and discharge electrodes 2a and 2b which excite the gas are housed; and an intermediate cavity S<SB>2</SB>one end of which is opened in the internal wall surface of the main cavity S<SB>1</SB>in the propagating direction of laser light L as a first opening 21 and the other end of which is constituted as a second opening 22 communicated with the external space. The window 61 closes the second opening 22. An inclined member 25 provided around the first opening 21 on the internal wall surface of the main cavity S<SB>1</SB>has a slope 251 inclined, so that the slope 251 is raised to the main cavity S<SB>1</SB>side from a virtual plane orthogonally crossing the propagating direction of the laser light L as approaching the center of the first opening 21 along the virtual plane. COPYRIGHT: (C)2006,JPO&NCIPI |
