| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a liquid jet head which can surely prevent defective ejection such as clogging of a nozzle with foreign matter. SOLUTION: The manufacturing process comprises a process of forming a piezoelectric element and also forming a through hole by removing a diaphragm of a region which becomes a communication part, a process of sealing the through hole by an adhesion layer and a metal layer, a process of forming a lead electrode to be led out from the piezoelectric element by patterning the adhesion layer and the metal layer of a region corresponding to the piezoelectric element, a process of bonding a reservoir formation substrate to one face side of a passage formation substrate by an adhesive, a process of forming a pressure generation chamber and the communication part by wet etching the passage formation substrate from the other face side until the diaphragm and the adhesion layer are exposed, a process of removing the adhesion layer of a region corresponding to the communication part by wet etching, a process of forming a protecting film of a material which has a liquid resistance to inner faces of the pressure generation chamber and the communication part, and a process of removing the metal layer by wet etching from the communication part side, thereby making a reservoir part and the communication part communicate with each other. COPYRIGHT: (C)2006,JPO&NCIPI
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