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发明名称
摘要
申请公布号	JP2006505696(A)	申请公布日期	2006.02.16
申请号	JP20040552170	申请日期	2003.11.12
申请人		发明人
分类号	C23C16/511;C23C16/34;C23C16/38;C23C16/40;C23C16/44;C23C16/455;H01L21/285;H01L21/314;H01L21/316;H01L21/768	主分类号	C23C16/511
代理机构		代理人
主权项
地址

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