| 发明名称 |
A FILM BULK ACOUSTIC RESONATOR PACKAGE AND METHOD OF FABRICATING SAME |
| 摘要 |
<p>A microfabricated device (15) has a first substrate (21), a second substrate, a film bulk acoustic resonator (FBAR) device (50), and a circuit (52). The second substrate is bonded to the first substrate to define a chamber (44). The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection (27, 56, 59) connects the circuit and the FBAR device.</p> |
| 申请公布号 |
WO2006016958(A1) |
申请公布日期 |
2006.02.16 |
| 申请号 |
WO2005US20793 |
申请日期 |
2005.06.13 |
| 申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
LARSON, JOHN, D. III;BAI, QING;MATTA, FARID;VERHOEVEN, TRACY |
| 分类号 |
(IPC1-7):H01L29/82;H01L21/30 |
主分类号 |
(IPC1-7):H01L29/82 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
