| 摘要 |
PROBLEM TO BE SOLVED: To provide a glass substrate for electrostatic capacity type pressure sensor capable of accurately detecting pressure changes. SOLUTION: This glass substrate 11 has a pair of main faces 11a, 11b that face each other. The glass substrate 11 is embedded with island-like bodies 12a, 12b formed of silicon. The island-like bodies 12a, 12b are respectively exposed in both the main faces of the glass substrate 11. On the main face 11a of the glass substrate 11, an electrode 13a is formed, such that the electrode 13a is electrically connected to one exposure portion of the island-like body 12a, and an electrode 13b is formed such that the electrode 13b is electrically connected to one exposure portion of the island-like body 12b. An electrode 14 is formed on the main face 11b of the glass substrate 11, such that the electrode 14 is electrically connected to the other exposure portion of the island-like body 12a, and a silicon substrate 15, having a pressure-sensitive diaphragm 15a, is jointed on the main face 11b of the glass substrate 11. COPYRIGHT: (C)2006,JPO&NCIPI
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