发明名称 Semiconductor device and method for fabricating the same
摘要 The method for fabricating a semiconductor device comprises the steps of: forming a dummy electrode 22 n and a dummy electrode 22 p; forming a metal film 32 on the dummy electrode 22 p; conducting a thermal treatment at a first temperature to substitute the dummy electrode 22 n with an electrode 34 a of a material containing the constituent material of the metal film 32 ; forming a metal film 36 on the dummy electrode 22 n; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrode 34 a and the metal film 36 does not take place, to substitute the second dummy electrode with an electrode 34 b of a material containing the constituent material of the metal film 36.
申请公布号 US2006035427(A1) 申请公布日期 2006.02.16
申请号 US20050245089 申请日期 2005.10.07
申请人 FUJITSU LIMITED 发明人 KUDO HIROSHI;NAGANUMA JUNKO;KISHII SADAHIRO
分类号 H01L21/28;H01L21/8238;H01L21/336;H01L27/092;H01L29/423;H01L29/49 主分类号 H01L21/28
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