发明名称 |
Semiconductor device and method for fabricating the same |
摘要 |
The method for fabricating a semiconductor device comprises the steps of: forming a dummy electrode 22 n and a dummy electrode 22 p; forming a metal film 32 on the dummy electrode 22 p; conducting a thermal treatment at a first temperature to substitute the dummy electrode 22 n with an electrode 34 a of a material containing the constituent material of the metal film 32 ; forming a metal film 36 on the dummy electrode 22 n; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrode 34 a and the metal film 36 does not take place, to substitute the second dummy electrode with an electrode 34 b of a material containing the constituent material of the metal film 36.
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申请公布号 |
US2006035427(A1) |
申请公布日期 |
2006.02.16 |
申请号 |
US20050245089 |
申请日期 |
2005.10.07 |
申请人 |
FUJITSU LIMITED |
发明人 |
KUDO HIROSHI;NAGANUMA JUNKO;KISHII SADAHIRO |
分类号 |
H01L21/28;H01L21/8238;H01L21/336;H01L27/092;H01L29/423;H01L29/49 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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