STICKING DEVICE, STICKING METHOD AND PROGRAM FOR CONTROLLING STICKING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a sticking device, sticking method and program for controlling a sticking device capable of reducing air bubbles remaining in an adhesion layer even though air evacuation time and atmosphere exposure time are short and improving productivity.

SOLUTION: This sticking device for sticking a pair of substrates P1 and P2 coated with an adhesive is provided with a mounting base 3 for mounting one substrate P1, a holding part 4 for holding the other substrate P2 with a prescribed interval D from the one substrate P1 and a housing part 5 for housing the substrates P1 and P2. An air evacuating device for expanding and bursting air bubbles in an adhesion layer R2 before being stuck and an air supplying device for raising pressure around the substrates P1 and P2 by supplying gas to the housing part 5 so as to compress the air bubbles in the adhesion layer R2 before being stuck are connected to an air supplying/evacuating opening 6 of the housing 5.

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