| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminate piezoelectric ceramic structure using, in addition to Si and ceramic, inexpensive metal materials such as stainless steel, copper, iron and nickel as a substrate material and having a lead-containing piezoelectric ceramic thick film such as PZT with excellent piezoelectric characteristics, and to provide its manufacturing method. <P>SOLUTION: The laminate piezoelectric ceramic structure consists of a metallic layer made of copper or platinum group metal laminated as an intermediate layer 2 between a substrate 3 and the lead-containing piezoelectric ceramic thick film 1. The lead-containing piezoelectric ceramic contains at least one of MnO, Mn<SB>2</SB>O<SB>3</SB>, Mn<SB>3</SB>O<SB>4</SB>, BaO, CaO and SrO and is resistant to reduction. The piezoelectric ceramic layer is formed by an aerosol deposition method, and the laminate piezoelectric ceramic structure is subjected to heat treatment in an inert atmosphere or reducing atmosphere. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
