Bi-LAYERED COMPOUND NANO PLATE, ITS ARRAY, ITS PRODUCING METHOD AND DEVICE USING THE ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a Bi4Ti3O12nano plate, the array of the Bi4Ti3O12nano plate, its producing method and a device using the array. SOLUTION: A flux layer consisting of VOXis deposited on an SrTiO3(001) face substrate and Bi4Ti3O12is deposited on the flux layer by using a vapor deposition method. A cuboid-shaped Bi4Ti3O12single crystal nano plate is formed to be upright on the flux layer. The direction of the three sides of a cuboid coincides with the direction of the specified crystal of a single crystal substrate. The cuboids are shaped to be nearly uniform and arrayed densely without contacting with each other. The nano plate is a nano structural member by a bottom up method and can be applied to a ferroelectric memory and the like at a low cost. COPYRIGHT: (C)2006,JPO&NCIPI