摘要 |
PROBLEM TO BE SOLVED: To provide a thin inorganic film filter with geometrically specified pores of a size on the order of micron or less with accurately regulated width and length and to provide a thin-film diffusion blocking layer for controlled temporal release of a reagent or a drug. SOLUTION: A thin-film polysilicone is perforated by etching or the like and is coated with a straight-chain molecule coating, which can effectively crystallize at a specific freezing point or below to provide a filter with pores. In this case, the coating temperature is controlled. A filter with pores coated with highly polarizable chain molecules is provided, and an electric field across the pores is regulated. COPYRIGHT: (C)2006,JPO&NCIPI
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