| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holding device which allows undisturbed approach to the rear face of a wafer during inspection and minimizes the stress applied on the wafer. SOLUTION: The wafer holding device comprises a first plate having at least one spacer 34 and a second plate 24 having at least one finger 38. When the second plate 24 is in an open position with respect to the first plate, the finger 38 is positioned away from a lip 36. When the second plate 24 is in a closed position with respect to the first plate, the at least one finger 38 is positioned on the second plate 24 so that the finger 38 and the lip 36 cooperatively secure a predetermined portion of a wafer W between the finger 38 and the lip 36. COPYRIGHT: (C)2006,JPO&NCIPI |
