发明名称 DIE BONDER
摘要 PROBLEM TO BE SOLVED: To provide a die bonder capable of enhancing bonding accuracy furthermore. SOLUTION: An arbitrary chip 4 on a monitor screen is recognized (S1), and its initial position coordinate (X0, Y0) is stored (S2). The chip 4 is moved in the X direction by means of an XY table and the after movement coordinate (X1, Y1) is stored (S4). X direction movement and Y direction movement are determined between the initial position coordinate (X0, Y0) and the after movement coordinate (X1, Y1), and the gap angleθof the coordinate axis of a monitor screen to the coordinate axis of the XY table is operated (S5). Coordinate on the XY table is calculated using this gap angleθand the XY table is driven based on this coordinate (S6). COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006049665(A) 申请公布日期 2006.02.16
申请号 JP20040230177 申请日期 2004.08.06
申请人 NIDEC TOSOK CORP 发明人 FUJII TOSHIHEI
分类号 H01L21/52;G06T1/00;G06T3/00 主分类号 H01L21/52
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