| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray image reconstitution device capable of realizing a sub-micron of spatial resolution, and capable of acquiring an image numeral data in a short time. SOLUTION: In this X-ray image reconstitution device, a rotation position of a movable blade 54 with respect to an inspected area 60 is set at a prescribed position, and the movable blade 54 is moved with every prescribed sample point interval from the fully closed position to the fully opened position. X-ray intensity I obtained from an X-ray beam diffracted by a specimen and passed through a portion not shielded by the movable blade 54 is computed on a computer side, and a difference of the X-ray intensity I per the sample point interval is computed therein. The difference serves as an intensity profile of an X-ray image diffracted by the specimen. Processing of this manner is carried out while changing the rotation position of the movable blade 54 within at least 180°of range, and an image of the inspected area 60 in the specimen is reconstituted by a reverse projection method, based on a difference value in the every sample point interval. COPYRIGHT: (C)2006,JPO&NCIPI
|
