| 摘要 |
The enhanced detection of defects in the bulk dielectric material (Specimen) having radiation partly reflected at interfaces where the dielectric constant changes (e.g., where there are defects or structures). A sinusoidal or quasisinusoidal wave (Microwave Source) results. Localization or imaging of features is enhanced by exploiting the variation in distance resolution (Standoff+/-) in a sinusoidal or quasi-sinusoidal standing wave. At characteristic distances, the wave has a high slope and the amplitude of the wave varies strongly with small changes in distance (Standoff +/-). By inspecting at these characteristic distances (Standoff +/-), the resolution is enhanced. By systematically varying the position of the transducer or specimen, detailed images may be formed of the internal structure of the specimen across a range of depths. Defects and structures may be detected at smaller sizes than has previously been possible. |
