| 摘要 |
PROBLEM TO BE SOLVED: To surely prevent the grinding wheel fixing surface of a grinding wheel from abutting on a workpiece or a holding surface at the time of the feed operation of a grinding means by grasping the varied height of the holding surface all the time in a grinding device of a type varying the height of the holding surface of a chuck table. SOLUTION: Interlock control preventing the wheel base 36 of the grinding wheel 35 from abutting on the chuck table 20 or a wafer 1 is performed based on intervals between the wheel base 36, and the upper face 20A of the chuck table and the wafer 1 independently of the height of the grinding wheel 37. COPYRIGHT: (C)2008,JPO&INPIT
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