| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a more efficient microlens array system. <P>SOLUTION: A projection system comprises a lens array constituted such that it receives a beam to which pattern forming was carried out, divides the beam to which pattern forming has been carried out into a plurality of nearly polygonal portions, focuses the nearly polygonal portions respectively, and forms radiation spots on the target portion of a substrate. In one embodiment, an illumination system comprises an illumination unit, constituted such that it receives a radiation beam from a radiation source. The illumination unit comprises lens array constituted such that it divides the radiation beam from the radiation source into a plurality of nearly polygonal portions and focuses the nearly polygonal portions on the elements of the array of the elements which can be controlled individually. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
