| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an aligner for manufacturing a liquid crystal, the aligner capable of keeping the formation accuracy of a circuit pattern for a long time. <P>SOLUTION: The aligner is equipped with: an illumination optics 3 to illuminate light for exposure; an exposure processing chamber 4 to project the light in a circuit pattern onto a resist film of a substrate 7 for a liquid crystal panel via a projection lens 6; a projection lens segment chamber 6b to separate the projection lens 6 from other segment of the exposure processing chamber 4; an exposure chamber circulation passage 4d to chemically cleaning inside the exposure processing chamber 4; and a filter unit 4b in the exposure process system having a plurality of chemical filters with different adsorption characteristics from one another in the exposure processing chamber circulation passage 4d. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
