PIEZOELECTRIC COMPLEX UNIT, ITS MANUFACTURING METHOD, ITS HANDLING METHOD, ITS CONTROL METHOD, INPUT/OUTPUT DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To allow a laminate piezoelectric body group where one or more leading electrodes and piezoelectric elements are laminated to function as both an actuator and a power detection sensor.

SOLUTION: This piezoelectric complex unit is provided with: an electrode 2 for power supply; a common electrode 6; an electrode 8 for signal detection; a first piezoelectric element 3 connected between the electrode 2 for power supply and the common electrode 6; and a second piezoelectric element 7 connected between the common electrode 6 and the electrode 8 for signal detection. A predetermined voltage is supplied between the electrode 2 for power supply and the common electrode 6, and a power detection signal based on an external force is extracted from the electrode 8 for detection. Thus, there is provided a piezoelectric complex unit where a piezoelectric bi-morph type actuator and the force detection sensor are combined.

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