| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate with recessed parts for a microlens which can fully promote isotropic etching by preventing an etching mask film from being removed or broken at the time of wet etching. <P>SOLUTION: The method for manufacturing the substrate(S) with recessed parts for the microlens comprises a step for forming etching mask films(12, 14) on the surface of the substrate(10), a step for forming through-holes(16) by irradiating a laser beam in the region where each recessed part is formed, and at the same time, deteriorating whole etching mask films(12, 14) by heating, and a step for forming recessed parts(20) on the surface of the substrate by bringing an etching liquid into contact with the surface of the substrate(10) exposed by the through-holes(16). <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
