LASER BEAM MACHINING EQUIPMENT AND LASER CRYSTALLIZATION EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining equipment which suppresses the generation of thermal lens effect due to a homogenizer, and avoids the deformation of an imaging pattern on an object to be machined or the reduction of resolution.

SOLUTION: The laser beam machining equipment is provided with: a lighting optical system (2:2a-2e) to light a mask (1) by a laser light whose illuminance is uniformed by means of a homogenizer (2c); and an image formation optical system (4) arranged between the mask and an object (3) to be machined. The lighting optical system is provided with a beam diffuser (2e) which is arranged between the homogenizer and the mask to diffuse an incident light.

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