| 摘要 |
PROBLEM TO BE SOLVED: To provide a panel manufacturing system for a plasma display panel or the like capable of almost fully automating the manufacturing of a panel such as the plasma display panel. SOLUTION: The system is provided with a closed-loop circulating path 1, a plurality of carts 2 moving on the circulating path, a substrate mounting part fitted to the cart, an exhaust tube mounting part on which an exhaust tube is mounted, an exhaust device fitted to the cart and connected to the exhaust tube mounting part, a heat treatment furnace 8 installed in the circulating path for carrying out sealing treatment and exhaust treatment, a loading-on/off part 9 installed in the circulating path, conveyors 10, 11 for conveying substrates and exhaust tubes, robots 12 to 15 fitted to the loading-on/off part moving according to control information to carry out panel manufacturing work, a conveyor 16 to carry out panels from the loading-on/off part, and control boards 17 to 20 controlling the robots or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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