Capacitor structure in semiconductor component trough structures, comprises conducting islands made of metallic and/or semiconducting materials and/or metal compounds

摘要

A capacitor structure (3) in semiconductor component (1) trough structures (2) comprises conducting islands made of metallic and/or semiconducting materials and/or metal compounds. The conducting islands are stacked on top of one another at at least two opposing locations on the trough structures. The inner walls of the trough have an insulating coating (13). The regions between the islands are filled with insulating and dielectric material (15).