PROCESSING SYSTEM, PROCESSING METHOD, COMPUTER READABLE RECORDING MEDIUM AND COMPUTER PROGRAM

摘要

A processing system (1) is provided with a processor (10) for performing a prescribed process to a wafer (W); a plurality of detecting means for detecting the status inside the processor (10); an abnormality detecting part (15) for detecting abnormalities of detection information from the plurality of detecting means; an alarm generating part (16) for generating an alarm when the abnormality detecting part (15) detects an abnormality; an information accumulating part (17) for accumulating the detection information from the detecting means of the processor (10) and alarm information as processing history of the processor (10); an alarm-related information acquiring part (18) for selectively acquiring information relating to a selected alarm from the information accumulating part (17); and a display part (21) for displaying the alarm-related information acquired by the alarm-related information acquiring part (18).