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发明名称
Herstellungsverfahren für eine Verbindung
摘要
申请公布号
DE19855924(B4)
申请公布日期
2006.02.16
申请号
DE19981055924
申请日期
1998.12.02
申请人
MOSEL VITELIC INC., HSINCHU;PROMOS TECHNOLOGIES, INC.;SIEMENS AG
发明人
TSAI, NIEN-YU;CHANG, HONG-LONG;CHEN, CHUN-WEI;KUNG, MING-LI
分类号
H01L21/283;H01L21/768
主分类号
H01L21/283
代理机构
代理人
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