| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a unit and a method for controlling adhesion of a near field exposure mask, with which adhesion of a foreign matter to the exposure mask can be suppressed and throughput can be improved at the time of adhesion exposure by the exposure mask, and to provide the near field exposure mask. <P>SOLUTION: The adhesion control unit of the near field exposure mask has a pressure adjusting container 208 for controlling the near field exposure mask 100 to be brought close to a substrate to be exposed 202. The pressure adjusting container has a sealed structure in a state where the near field exposure mask is fitted, and pressure can be adjusted by a change of capacity of the pressure adjusting container. A part of the pressure adjusting container can be varied or pressure can be adjusted by the change of capacity of an auxiliary chamber connected to the pressure adjusting container. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
