| 摘要 |
A semiconductor manufacturing apparatus and a method for processing protection of voltage sag are provided to prevent an economic loss by normally performing a process without equipment power and alarm generation in the voltage sag. A semiconductor manufacturing apparatus(100) includes a power control unit(102), a system control unit(104), a detection unit(106), and first and second switching units(114,116). The power control unit controls a general power supply unit(112) and an uninterruptible power supply unit(110) for supplying AC power. The system control unit controls all operations of the semiconductor manufacturing apparatus to perform an ashing process. The detection unit detects the voltage sag based on a predetermined time. The first and second switching units supply and block the power of the general power supply and the uninterruptible power supply through control of the power control unit.
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