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发明名称
METHOD OF COLLECTING IMPURITIES AND APPARATUS FOR PERFORMING THE SAME
摘要
申请公布号
KR20060015200(A)
申请公布日期
2006.02.16
申请号
KR20040064051
申请日期
2004.08.13
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SONG, SUN JIN;KIM, JAUNG JOO;KWAK, HEE JIN;KIM, JIN SUNG
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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