| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable slit arrangement and the like capable of appropriately correcting irregularity in exposure. <P>SOLUTION: A variable slit arrangement 100 for forming slit-like illumination light EL comprises a tape 10 to form one major side L of the illumination light EL, and a tape processing part 50 which processes the tape 10 to change the form of major side L. The variable slit arrangement 100 is used as a device for adjusting the form of the illumination light EL in an illumination device for projecting the slit-like illumination light EL to an object to be illuminated. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
