| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of applying a transparent and gastight coating by means of a sputtering arrangement onto a substrate of a synthetic material, and to produce a reflecting barrier layer with the same sputtering arrangement. SOLUTION: An arrangement and a method are for the production of gas-impermeable layers, in particular for the production of the coating of gas-permeable synthetic material substrates. With the aid of this arrangement or of the method, light-permeable as well as also light-impermeable gas-blocking layers are produced using only one sputtering installation. A simple change-over switching from one gas supply, for example argon, to a second gas supply, for example argon, oxygen and nitrogen is carried out or the converse also can be done. COPYRIGHT: (C)2006,JPO&NCIPI |
