ACTIVE MATRIX SUBSTRATE, MANUFACTURING METHOD THEREOF, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide technology for forming an active matrix substrate having a driving circuit where high speed driving is possible and a load circuit with low off current by a low temperature process. SOLUTION: An active semiconductor film in an almost single crystal state is formed as a semiconductor film of TFT which constitutes the driving circuit, and an active semiconductor film in a microcrystal state is formed as a semiconductor film of TFT which constitutes a pixel circuit. To put it concretely, a local heating mechanism which locally heats the active semiconductor film at the time of crystallization is installed in a region where TFT constituting the driving circuit is formed. The local heating mechanism is not arranged in a region where TFT constituting the pixel circuit is formed. COPYRIGHT: (C)2006,JPO&NCIPI