| 摘要 |
PROBLEM TO BE SOLVED: To prevent the temperature reduction of an expansion member for retaining an airtightness of a processing chamber. SOLUTION: A heater unit 327 is provided in a processing chamber 201. The heater unit 327 is supported by a support body (drive shaft) 376 to be inserted from the bottom of the processing chamber 201 so as to go up and down. Bellows (expansion members) 279 are provided outside of this support body 376. The bellows 279 allow a straight axis movement of the support body 376, while sealing an insertion part 378 into the processing chamber 201 of the support body 376. A cylindrical heating means 380 is provided coaxially with the bellows 279 via the bellows 279 and a space 388 outside of the bellows 279. This cylindrical heating means 380 is composed of male-female two cylindrical heaters 381, 382 so as to expand and contract the cylindrical heating means 380 together with expansion and contraction of the bellows 279. COPYRIGHT: (C)2006,JPO&NCIPI |
