发明名称 |
Process to manufacture an electrolytic capacitor by heat and oxidation treatment of two layers and formation of a third layer between |
摘要 |
<p>In a process to make a capacitor with first (12) and second (18) capacitor dielectric layers are heat treated and selectively oxidised. The heat treatment and oxidation form a third layer (13) between the two first layers (12, 18).</p> |
申请公布号 |
DE102004040047(B3) |
申请公布日期 |
2006.02.16 |
申请号 |
DE20041040047 |
申请日期 |
2004.08.18 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
SEIDL, HARALD;GUTSCHE, MARTIN ULRICH |
分类号 |
H01L21/8242 |
主分类号 |
H01L21/8242 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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