摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that can prevent peeling of wiring in wiring and drive, contact failures, and the dissolution of an electrode, and can be driven stably. <P>SOLUTION: The piezoelectric actuator 1 comprises an oscillator 2 that has a reinforcing plate 21 and a piezoelectric element 22 and is driven by applying an AC voltage to the piezoelectric element 22 for oscillating; a contact 3, that is provided on the reinforcing plate 21 and is brought into contact with a body R to be driven by the oscillation of the oscillator 2 for transmitting driving force to the body R to be driven; drive electrodes 12, 13 provided on the surface of the piezoelectric element 22 for applying an AC voltage to the piezoelectric element 22; and detection electrodes 11, 14 provided on the surface of the piezoelectric element 22 for detecting the voltage induced by the piezoelectric element 22, when the oscillator 2 oscillates. The drive electrodes 12, 13 and the detection electrodes 11, 14 partially have continuity sections 51-54, 61, 62 that are thicker than the remaining section on a part of it. <P>COPYRIGHT: (C)2006,JPO&NCIPI |