| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and a manufacturing method of an optical recording medium by which the film thickness accuracy of a thin film formed on a substrate can be improved by adjusting the temperature of the substrate immediately before the thin film is formed by spin coating in a short time without occupying a large space. SOLUTION: A temperature adjusting table apparatus has a table 2 placing a disk substrate 1 and a refrigerant flow path 8 in which a refrigerant which controls the temperature of the table 2 and of which the temperature is controlled by an external temperature adjusting machine is made to flow. After the temperature of the disk substrate 1 is adjusted to a temperature optimum for forming a thin film on a main plane of the disk substrate 1 by spin coating by placing the disk substrate 1 on the table 2 and controlling the temperature of the table 2, the thin film such as a light transmission layer is formed on the main plane of the disk substrate 1 by spin coating. COPYRIGHT: (C)2006,JPO&NCIPI
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