发明名称 DETECTOR FOR DISPLACEMENT
摘要 PROBLEM TO BE SOLVED: To provide a detector for displacement capable of acquiring sufficient detection signals without tilting of detection members material to a scale even when the scale moves over to other direction than the detecting direction greatly, and reading out the scale correctly without any conflicts. SOLUTION: An arm section 4b, a joining section 4c, and a magnetic head attaching section 4d are installed on a support plate 4 supporting a magnetic head 1. A magnetic head 1 is attached to the magnetic head attaching section 4d so as to be swingable using the joining section 4c as a fulcrum. Moreover, a pressurization point 5a of a pressurized spring 5 is placed at the position shifting to the direction of +X from the joining section 4c (between a fixing section 4a and the joining section 4 in the direction of X). COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006047238(A) 申请公布日期 2006.02.16
申请号 JP20040232020 申请日期 2004.08.09
申请人 NIKON CORP 发明人 KISHIMOTO TAKASHI;KAMATA TETSUHARU
分类号 G01D5/244 主分类号 G01D5/244
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