发明名称 |
Micro-electro-mechanical sensor with force feedback loop |
摘要 |
A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.
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申请公布号 |
US2006032309(A1) |
申请公布日期 |
2006.02.16 |
申请号 |
US20050195363 |
申请日期 |
2005.08.02 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
CAMINADA CARLO;LASALANDRA ERNESTO;PRANDI LUCIANO |
分类号 |
G01P15/13;G01C19/56;G01C19/5726 |
主分类号 |
G01P15/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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