MICROSTRUCTURE APPARATUS AND METHOD FOR PRODUCTION OF MICROSTRUCTURE APPARATUS

摘要

Disclosed is a method for producing a microstructure apparatus.The method comprises the following steps: an application step for applying a paste containing balls composed of a waxy material and metal balls onto the surface of a second substrate (3); a heating step for heating the paste to a temperature which is equal to or higher than the melting temperature of the balls composed of a waxy material and is lower than a temperature at which the metal balls are bound to each other through a compound formed from a material contained in the balls composed of a waxy material and a material contained the metal balls; and a heat compression step for heat-compressing a first substrate (2) and the second substrate (3) while contacting the paste with the surface of the first substrate (2), thereby connecting the first substrate (2) to the second substrate (3) through the compound and the metal ball.